3D NANOCHEMISCOPE

Project Information
Project
3D NANOCHEMISCOPE
Title
Combined SIMS-SFM Instrument for the 3-Dimensional Chemical Analysis of Nanostructures
Abstract
The objective of this project is to develop an innovative and novel combination of a new TOF-SIMS with substantially improved lateral resolution and sensitivity, combined with a new metrological high resolution SFM. The two techniques provide complementary information on nanoscale surface chemistry and surface morphology. In combination with a layer by layer removal of material using low energy sputtering, quantitatively measured by SFM, this combined ultra-high vacuum (UHV) instrument will be unique for the 3-dimensional chemical characterisation of nanostructured inorganic as well as organic materials with down to at least 10 nm lateral resolution and down to 1 nm depth resolution. Joint by a novel software for the calculation and display of 3-dimensional distributions of all chemical species, this leads to a totally new “3D NanoChemiscopeâ€.
Start Date
9 March 2009
Stop Date
1 February 2014
Programme
FP7
Sub-Programme
7.A.SP1
Instrument
CP
Theme
Nanosciences, Nanotechnologies, Materials and new Production Technologies
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Sector Activity

SectorSubsectors
Manufacturing
BOTTOM-UP (1)
The data has been prepared for the European Commission (DG Research & Innovation) in a procurement study between 2013-2017. The information reflects the views only of the authors JIIP