Techniques for high precision deposition Combination of Large-Area Pulsed Laser Deposition(LA-PLD) and Magnetron Sputter Deposition (MSD). High precision deposition of nanometer single and multilayers. Accuracy and homogeneity in the sub-nanometer range. Multilayer stacks for a wide variety of applications. Constant and graded thickness distributions Deposition of rectangular substrates and substrates up to 8 inch diameter (LA-PLD)
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