| Abstract |
The project investigates the development of original methods and algorithms for the dimensional and geometric verification of products and/or surface features defined at micro and nanometric scales. The idea is to overcome the current limitations of SEM imaging (only qualitative information) and micro/nano CMMs (slow, difficult to use) through an unconventional use of measurement data produced by advanced 3D profilometers and microscopes, which are being currently adopted in surface metrology for areal surface texture assessment.
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