PROBLEM TO BE SOLVED: To provide a nanoimprint-mold release agent which can reduce pattern defects due to affinity at the time of mold release while rarely affecting a pattern size owing to its release layer having favorable release characteristics and which can form imprint with high accuracy.

SOLUTION: The nanoimprint-mold release agent is formed with an alkoxysilane compound expressed by a general formula (1) or a silazane compound expressed by a general formula (2) (wherein Rfand Rf' are each independently a fluoroalkyl group having a carbon number of 1 to 10 and they may be the same or different from each other; R1is a hydrogen atom or an aliphatic monovalent hydrocarbon group having a carbon number of 1 to 6; R2and R3are each independently a methyl group or an ethyl group and they may be the same or different from each other; X and Y are each independently an ether linkage or an ester linkage and they may be the same or different from each other; (a) and (b) are 0 or 1; m, n, and p are integers from 0 to 6; q is an integer from 1 to 6; and r is an integer from 0 to 2).

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